Long stroke/High resolution tip tilt mechanism

Multi degree of freedom (dof) mechanisms are widely required into micro or macro manipulation fields as well as in optronics functions. Commonly available mechanisms may be divided into two main categories. The first is industrial robots (serial or parallel). These offer large range of motion, in rotation and translation. Their resolution is usually limited in the sub-millimeter range. The second category achieves very high resolution motion (sub-nanometer) but is limited to a few decades of microns. A way to combine both long stroke and resolution is to use piezo motors into multi dof mechanisms. The aim of this paper is to present a combination of both advantages into a low volume tripod actuator. The Tripod Actuator by Cedrat Technologies (TrAC) is a 3 dof mechanism offering +/-35° rotation around X and Y axis and a 10mm Z translation stroke into a low volume of Ø50x50mm.