Nanometric positioning with IASI-NG Beam Splitter Mechanism Actuator

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Nanometric positioning with IASI-NG Beam Splitter Mechanism Actuator

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This paper presents a piezoelectric motor which provides linear motion and very high resolution (40 nm steps). First, the space application (IASI-NG instrument onboard METOP-SG satellite) and associated performance requirements are presented. The internal architecture of the motor and its main components are then explained. A first focus is done on the experimental verification of the threaded interface lifetime which is a key element of the mechanism. A second focus is on the nanometric position test bench. Achieved results are provided for resolution, motion quality and position stability. Finally, results from the
vibration test campaign are presented