The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.
XYZ200M
The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.
| Max no load displacement | 200 µm |
|---|---|
| Unloaded resonance frequency | 380 Hz |
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| Dimensions | |
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