M-FSM62
The MFSM62 is a Magnetic based Fast Steering Mirror of +30 mm diameter clear aperture in SiC substrate with +85 mrad angular stroke in open loop and +50 mrad in closed loop. The MFSM62 can be equipped with Eddy Current positioning sensor (ECS) for accurate positioning control.
| Max angular stroke | |
|---|---|
| Unloaded resonance frequency | 100 Hz |
| Dimensions | |
| Status |
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