M-FSM62
Magnetic Fast Steering Mirror
The MFSM62 is a Magnetic based Fast Steering Mirror of +30 mm diameter clear aperture in SiC substrate with 140 mrad angular stroke in open loop and 120 mrad in closed loop. The MFSM62 can be equipped with Eddy Current positioning sensor (ECS) for accurate positioning control.
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| Loaded resonance frequency | |
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