Abstract:
Stepping Piezoelectric Actuators (SPA) are new small long-stroke linear piezoelectric motors for micro/nano positioning applications benefiting of the advantages and the heritage of the APA. SPA is formed of only 4 parts: the well-established Amplified Piezoelectric Actuators (APA), a front mass, a clamp and a rod. SPA operates by accumulation of small steps, using inertial mode, impact forces and stick-slip effects, allowing performing long strokes (> 10mm). Main advantages induced by the choice of the APA above a usual inertial drive mechanism (IDM) are high reliability, low peak current (<0.1A), relatively high speed (> 20mm/s), useful forces (from 1N for XS to 30N for SM type) and nano positioning mode.