Modular Stepping Piezoelectric Actuators (MSPA) are inertial motors working under the stick-slip principle [1].
The advantages of rotary MSPA are unlimited stroke, torque at rest, high resolution, nonmagnetic and vacuum compatibility.
This paper presents the new MSPA developments regarding rotary motion at Cedrat Technologies for macro and
micro sizes MSPA. These progresses follow the previous technical investigations around noise reduction, miniaturization
at low voltage and the integration of MSPA modules [2]. In this paper two rotary piezo motors are presented: The first
one is a macro size MSPA based on APA40SM. It is developed to work under nuclear environment: operational temperature
up to 70 degrees, vacuum, 5 Tesla magnetic field and high radiation fields (3,5 kGy/hour gamma radiation power
and 500 Mn/(cm².second) neutron radiation power). The second is a micro size MSPA based on APA30uXS. This motor
is used for embedded application such as nonmagnetic shutter.