The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.
XYZ200M
Max no load displacement | 200 µm |
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Unloaded resonance frequency | 380 Hz |
Response time | |
Dimensions | |
Available options | |
Status |
Categories Piezo actuators, Piezo stages
Cedrat technologies
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Cedrat technologies