XY200M
The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.
| Max no load displacement | 200 µm |
|---|---|
| Unloaded resonance frequency | 580 Hz |
| Response time | |
| Dimensions | |
| Available options | |
| Status |
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